Air Bearing Application and Design Guide Rev E - New Way

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That is: three points define a plane, two points define a line, and one point describes a position on the axis of motion defined by the plane and line. One of the big advantages is that by knowing the stiffness and location of the support points in a kinematically supported structure, closed-ended mathematical equations can be used to predict the characteristics of the system, thus making the system ‘deterministic’. Modular vacuum preloaded air bearings mounted on flexures are easily utilized to support structures kinematically.

Con: Difficult alignment of vertical guides. Straightness guidance bearings far apart. Double Rail Keeper Inside Guide Pro: Flatness guidance from base granite. Con: Difficult alignment of straightness guide rails. More deflection of keeper. Double Rail Keeper Outside Guide Pro: Flatness guidance from base granite. Less deflection of keeper. Con: Difficult alignment of straightness guide rails. Double Rail Keeper Inside Dovetail Guide Pro: Less precision surfaces. Suitable for wide stages. Con: Doubly difficult alignment!

Custom VPLs can also be bonded in place using a process patented by New Way that produces a precision stage, without expensive precision machining. This technique is used to great effect in the X and Y stages of the Electroglas 300mm Wafer Prober (see Figure 20). A large, square VPL is also employed under the Z stage to allow it to float over the granite base. By adjusting the vacuum and air pressure, flying height and stiffness can be exactly optimized. Adjustability of air film thickness can be used in wafer processing for focusing, squaring, and sub-micron vertical positioning over a range of 20 microns.

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